一种利用等厚原理准确测量气垫平面度的方法

A Method for Accurately Measuring Flatness of Air Cushion Using Principle of Equal Thickness

气垫是三坐标测量机传动部分的重要零件,对机械精度、传动精度等都会对其产生一定影响。本文就测量气垫平面度现有方法的叙述、原因的分析、以及解决方法进行了分析,为进一步提高测量机整体精度提供技术支持。

The air cushion is an important part of the driving part of the CMM(coordinate measuring machine),which have the certain influence on mechanical precision,transmission precision and so on.The existing methods for measuring the flatness of air cushion is described and he reason is analyzed.The solution has carried on the analysis.The technical support is provided for further improving the overall accuracy of the measuring machine.