轧制变形量及退火工艺对钼靶材显微组织的影响

Microstructure of Molybdenum Target with Different Rolling Deformations and Annealing Processes

钼靶材作为制备钼薄膜的溅射源,其致密性、纯度、粒径及取向分布决定溅射薄膜的品质与性能。为了确定钼靶材轧制的最佳工艺,将钼靶材在60%~90%变形量下以不同工艺条件轧制,并在900~1200℃下以不同温度退火,然后采用精密测量、金相观察、扫描电镜成像(SEM)、 X射线衍射(XRD)、电子背散射衍射(EBSD)等方法表征钼靶成品的理化性能和组织结构,并分析和讨论钼靶材的致密度、晶粒度以及结晶取向等特征关系。结果表明,当轧制变形量为80%~85%时,钼靶致密度达到99.8%,经过1000℃真空退火后,组织均匀性最佳,测得平均晶粒尺寸为57.1μm,同时靶面呈现出显著的{100}晶面择优取向。

The relationship between the rolling and annealing processes and the density,grain size and crystal orientation of molybdenum targets was studied.Molybdenum target was rolled under different process conditions of 60%~90%deformation,and annealed at different temperatures of 900~1200℃.The physical and chemical properties and structure of molybdenum target were characterized by precision measurement,metallographic observation,scanning electron microscope imaging(SEM),X-ray diffraction(XRD),electron back scattering diffraction(EBSD)and other methods.The characteristics of molybdenum target,such as density,grain size and crystal orientation,were analyzed and discussed,and the best rolling process of molybdenum target was determined.The results show that when the rolling deformation was 80%~85%,the density of molybdenum target reached 99.8%.After vacuum annealing at 1000℃,the microstructure uniformity was the best,the average grain size was 57.1μm,and the target surface showed a significant{100}crystal surface preferred orientation.