TiAlSi合金真空电磁感应熔炼工艺研究

Research on Vacuum Electromagnetic Induction Melting Process of TiAlSi Alloy

采用真空电磁感应熔炼技术,使用单质原料熔炼TiAlSi三元合金,研究熔炼工艺参数(放料顺序、搅拌时间)对熔炼产物的影响,探究成分均匀TiAlSi合金的熔炼制备工艺,并对产物成分、金相组织、物相组成及硬度进行分析,为TiAlSi阴极靶材的加工制备提供依据,为TiAlSiN高性能防护涂层的制备奠定基础。

The vacuum electromagnetic induction melting technology was adopted to smelt TiAlSi ternary alloy with simple substance raw materials.Moreover,the influence of melting process parameters(the sequence of material feeding and stirring time) on the melting products was studied.The melting preparation process of TiAlSi alloy with uniform composition was explored,and the product composition,metallographic structure,phase composition and hardness of the products were analyzed,providing a basis for machining and preparation of TiAlSi cathode target material and laying a foundation for the preparation of TiAlSiN high-performance protective coatings.