基于螺旋弹簧的引信用低g值MEMS惯性开关

Low-g MEMS inertial switch with spiral spring for fuze

微机电系统(MEMS)惯性开关在引信领域有广阔的应用前景,但可用于引信工作环境的低g值型MEMS惯性开关较少。对此,为低发射过载的弹药引信提出一种低闭合阈值的MEMS惯性开关设计方案,满足引信识别低g值冲击信号的功能需求,实现稳定接通引信电源的功能,同时具备抵抗引信工作环境中高过载的能力,提高引信可靠性。依据触发信号特征和引信工作环境提出设计要求,对惯性开关的振荡模型进行理论分析,阐明惯性开关结构尺寸对开关性能的影响规律,给出开关整体设计方案,并应用ANSYS有限元软件对设计结果进行仿真验证。仿真结果表明,所设计的惯性开关能够监测幅值为20g、脉宽为1 ms的冲击信号,开关响应时间小于1 ms,电极接触时间长于30μs,抗过载性能达到12 000g,满足性能指标要求。

Micro-Electro-Mechanical System(MEMS)inertial switch has broad application prospects in the field of fuze,but there are few low-g MEMS inertial switches that can be used in the working environment of fuze.A design of MEMS inertial switch with low closing threshold is proposed for the fuse of ammunition with low launch overload,to meet the functional requirements of the fuze to identify the low-g value impact signal,and to realize the function of stable connecting the fuze power supply.At the same time,the designed MEMS inertial switch has the ability to resist high overload in the fuze's working environment and improve the reliability of the fuze.The design requirements are put forward according to the characteristics of the trigger signal and the working environment of the fuze.The oscillation model of the inertial switch is theoretically analyzed.The influence law of the structural size of the inertial switch on the switch performance is clarified.The overall design scheme of the switch is given,and the design results are simulated and verified by ANSYS finite element analysis software.The simulation results show that the designed inertial switch can monitor the impact signal with amplitude of 20g and pulse width of 1 ms,the response time is less than 1 ms,the electrode contact time is longer than 30μs and anti-overload performance reaches 12000g,meeting the proposed performance index requirements.