平面光学元件超平整吸附装载的优化设计与分析

Optimal Design and Analysis of Ultra-flat Adsorption Loading for Planar Optical Components

在平面光学元件加工和应用中,采用真空吸附方式进行装载,具有快速、稳定的优势,而真空吸附对平面光学元件的面形影响不可忽视。基于有限元分析方法,针对功能窗口限制、倒立装载等特殊需求,对真空吸盘气道进行优化设计,并通过实验对真空吸盘的实际效果进行分析。实验结果表明,在吸盘不锁紧状态下吸附,平面光学元件在中心Ф10 mm、Ф20 mm和Ф40 mm范围内,面形PV分别为1.2 nm、5.1 nm和20.8 nm。在此基础上,论文进一步分析了装载平台平整度、吸盘装载方式和吸盘锁紧力对吸附结果的影响,结果表明:平面光学元件吸面型随着装载平台平整度的提升而提升;装载平台平整度2μm条件下,采用四螺钉、2.5 N·m扭矩进行边沿固定,吸附效果达到最好,在中心Ф10 mm、Ф20 mm和Ф40 mm范围内,面形PV平均值分别为7.8 nm、27.7 nm和114.2 nm,装载重复性标准差为0.93 nm、3.2 nm和10.6 nm。

In the processing and application of flat optical components,vacuum adsorption loading has the advantages of fast and stable.However,the influence of vacuum adsorption on the surface shape of flat optical components cannot be ignored.Based on the finite element analysis method,the airway of the vacuum sucker is optimized for special requirements such as functional window limitation and inverted loading.Meanwhile,the actual effect of vacuum sucker is analyzed through experiments.The experimental results show that when the vacuum sucker is not locked,the surface PV(Peak to Valley)at the substrate center,within the range ofФ10 mm、Ф20 mm andФ40 mm,are 1.2 nm,5.1 nm and 20.8 nm,respectively.On this basis,the effects about the flatness of the loading platform,the loading method of the suction cup and the locking force of the suction cup on the adsorption effect are further analyzed.The results show that the surface PV of the flat optical element decreases with the increase of the flatness of the loading platform;When the flatness of the loading platform is 2μm,four screws and 2.5 N·m torque are used to fix the edge,and the adsorption result is the best;In the center range ofФ10 mm,Ф20 mm andФ40 mm,the mean surface PV are 7.8 nm,27.7 nm and 114.2 nm,respectively,and the loading repeatability standard deviations are 0.93 nm,3.2 nm and 10.6 nm.