烧结NdFeB磁体表面磁控溅射制备铝膜的工艺及耐蚀性能研究

Process and Corrosion Resistance of Aluminum Film Prepared by Magnetron Sputtering on NdFeB Magnet

采用磁控溅射在NdFeB磁体表面沉积Al薄膜,采用扫描电镜、X射线衍射、盐雾腐蚀实验等方法分析了不同溅射功率、时间和化学转化处理后的铝膜结构及耐蚀性。结果表明沉积的铝中间层和铝膜结构致密,膜/基界面平整。适当增大溅射功率和延长溅射时间,使铝膜厚度增加同时膜层表面平整度和致密度增大,具有良好的耐蚀性,能够对NdFeB磁体提供有效的保护。化学转化处理可使铝薄膜表面更加致密,进一步提高铝膜的抗腐蚀性能。

The aluminum films were deposited on NdFeB Magnet by Magnetron Sputtering.The structure and corrosion resistance of aluminum film after different sputtering power,time and chemical conversion treatment were analyzed by SEM,XRD and salt spray corrosion test.The results show intermediate layer and surface of the aluminum film have compact structure,and the film/substrate interface is smooth.Increasing the sputtering power and prolonging the sputtering time appropriately can increase the thickness of the aluminum film,in company with the surface roughness and density of the film.The deposited aluminum film has good corrosion resistance and can provide effective protection for NdFeB magnets.Chemical conversion treatment can make the surface of aluminum film more compact and further improve the corrosion resistance of aluminum film。