大面阵高分辨率三变倍双远心光学设计

Large array high-resolution triple-zoom double telecentric optical design

针对芯片在塑封工艺中的表面缺陷检测,设计一款大面阵高分辨率三变倍双远心光学系统。通过远心理想模型分析和像差优化,得到一款大视场、高精度、可变倍、低畸变的双远心光学系统。该系统采用6500 W像素的大面阵工业相机,由13片球形透镜组成,工作波长在可见光范围内,F数为7,放大倍率为-0.305^(x)、-0.427^(x)和-0.500^(x),系统总长小于362 mm。设计结果表明,不同倍率下的全视场调制传递函数在奈奎斯特频率156 lp/mm处都大于0.1,最大畸变不超过0.2%,物方远心度小于0.2°,该光学系统成像质量良好,在工业表面缺陷检测光学设计领域有着一定的参考价值。

In this paper,a large array high-resolution triple-zoom double telecentrica large front array high-resolution triplex double telecentric optical system is designed for surface defect detection of chips in the plastic encapsulation.Through the analysis of telecentric model and aberration optimization,a dual telecentric optical system with a large field of view,high precision,variable magnification and low distortion is obtained.The system uses a 6500 W pixel industrial camera consisting of 13 spherical lenses operating in the visible wavelength range with an F-number of 7,and magnification of-0.305^(x),-0.427^(x)and-0.500^(x),with an overall length of the system of less than 362mm.The design results show that the full-field-of-view modulation transfer function under different magnification is greater than 0.1 at the Nyquist frequency of 156 lp/mm,the maximum distortion is no more than 0.2%,and the telecycenter of the object is less than 0.2°.The optical system has good imaging quality,which has certain reference value of reference in the field of optical design for the detection of defects on the industrial surface.