类金刚石膜层制备及摩擦磨损性能

Preparation and friction and wear properties of diamond-like carbon films

为解决某型扭力臂轴及配合衬套的磨损问题,使用磁控溅射和等离子增强化学气相沉积技术,在30CrMnSi-Ni2A表面制备了渐变过渡结构的类金刚石膜层(DLC)。使用球磨法、纳米压痕法、划痕法测量DLC膜层性能,膜厚为4.3μm,硬度≥1900 HV,膜基结合力≥30 N。经过滑动磨损测试,膜层摩擦系数≤0.2,摩擦磨损率≤2×10^(-6) mm^(3)·r^(-1)。经过20000转次耐磨测试,与硬铬镀层的扭力臂轴对比,DLC膜层配合衬套的磨损量远低于硬铬镀层配合衬套,可满足扭力臂轴耐磨润滑需求。

To solve the wear problem of torsion arm shaft and sleeve,diamond-like carbon film(DLC)with a gradual transition structure was prepared on the surface of 30CrMnSiNi2A using magnetron sputtering and plasma enhanced chemical vapor deposition technology.The performance of DLC film was measured using ball milling,nano-indentation and scratch methods,with a film thickness of 4.3μm.The hardness was higher than 1900 HV,and the binding force between the film and substrate was higher than 30 N.By sliding wear test,the friction coefficient of the film was less than 0.2,and the friction and wear rate was less than 2×10^(-6) mm^(3)·r^(-1).Through 20000 revolutions of wear resistance testing,compared with the torsion arm shaft of hard chromium coating,the wear amount of DLC film matching sleeve was much lower than that of hard chromium coating matching sleeve,which could meet the wear and lubrication requirements of the torque arm shaft.