一种压力传感器温度漂移补偿修正算法研究

Design of Compensation Algorithm of Temperature Draft for the Pressure Sensor

本文剖析了压力传感器的温度漂移误差源头,为保证高输出精度,对温度漂移特征进行剖析和讨论,提出了一种温度漂移误差修正算法。以MEMS传感器为实例,在测量数据库的基础上,依据BP神经网络、最小二乘法等数值分析手段求出温度漂移补偿公式。MATLAB仿真结果证明了该温度漂移误差修正算法的有效性。

The reasons for the output errors of temperature draft of the high accuracy silicon pressure sensor are derived in this paper.In order to enhance the output accuracy,one software compensation algorithm of temperature draft is developed which is based on the analysis of the temperature draft character.Taking the MEMS pressure sensor as a example,the formula of the temperature draft is proposed by analyzing the large sample data.The methods of the BP neutral network and the least square are included.Additionally,the accuracy is simulated by the MATLAB software and the results confirm the correction and validity of the error compensation algorithm.