基于图像预处理的光学元件表面粗糙度测量系统

Surface roughness measurement system for optical components based on image preprocessing

在测量光学元件表面粗糙度时,测量结果往往比较片面,为此设计基于图像预处理技术的光学元件表面粗糙度测量系统。获取原始元件表面粗糙度干涉图像,通过对表面形貌图像实施图像去噪处理与倾斜校正处理获取滤波结果,通过自适应中值滤波算法实施图像的去噪处理。在粗糙度参数评定模块中,根据取样长度对评定长度下定义,实施光学元件表面粗糙度的全面评定。利用设计系统测量三种光学元件的表面粗糙度。实验结果表明:通过设计系统能够获取高成像质量的表面粗糙度干涉图像,实现多种元件表面粗糙度的全面测量,具有一定应用价值。

When measuring the surface roughness of optical components,the measurement results are often one-sided.Therefore,a surface roughness measurement system for optical components based on image preprocessing technology is designed.Obtain the interference image of the original component surface roughness,apply image denoising and tilt correction to the surface morphology image to obtain the filtering result,and implement image denoising through the adaptive median filtering algorithm.In the roughness parameter evaluation module,the evaluation length is defined based on the sampling length,and a comprehensive evaluation of the surface roughness of optical components is implemented.Measure the surface roughness of three optical components using a design system.The experimental results show that by designing the system,high imaging quality surface roughness interference images can be obtained,and comprehensive measurement of surface roughness of various components can be achieved,which has certain application value.