氮硅共掺对类金刚石薄膜组织及性能影响

Effect of Co-doping of N and Si on microstructure and properties of diamond-like carbon film

为了研究不同掺杂元素对类金刚石(DLC)薄膜改性的协同影响,利用等离子体增强化学气相沉积技术在2024铝合金表面制备N、Si共掺的DLC薄膜,研究N_(2)与TMS流量比对N/Si-DLC薄膜结构和性能的影响规律及相应机制。结果表明,随着N_(2)与TMS流量比值在一定范围内增大,N/Si-DLC薄膜与基体结合强度、硬度及弹性模量逐渐升高,但当N_(2)与TMS流量比继续增加后薄膜的力学性能反而出现下降趋势。N_(2)与TMS流量比为30∶30时,薄膜具有最高的硬度和弹性模量,分别为11.58 GPa和108.4 GPa。同时,N/Si-DLC薄膜耐蚀性能随N_(2)与TMS流量比值增大先升高后降低。N_(2)与TMS流量比为30∶30时,薄膜较致密,缺陷较少,耐腐蚀性能较好。

In order to study the synergistic effect of different doping elements on the modification of diamondlike carbon(DLC)films,DLC film co-doped with N and Si were prepared on the surface of 2024 aluminum alloy by plasma enhanced chemical vapor deposition(PECVD).The influence of different gas flow rates on the structure and properties of N/Si-DLC film and its mechanism was studied.The results show that with the increase of N_(2)and TMS flow ratio,the bonding strength between the film and the substrate increases gradually,and the hardness and elastic modulus increase gradually.When N_(2)and TMS flow ratio is 30∶30,the film has the highest hardness and elastic modulus,which are 11.58 GPa and 108.4 GPa respectively.At the same time,the corrosion resistance of N/Si-DLC film first increased and then decreased with the increase of N_(2)and TMS flow ratio.When the N_(2)and TMS flow ratio is 30∶30,the film is denser,with fewer defects and excellent corrosion resistance.