烧结温度对钛铝靶材性能的影响

Effect of Sintering Temperature on Properties of TiAl Target

文章采用热等静压工艺制备钛铝合金靶材(Ti∶Al=1∶1,at.%),研究烧结温度(1150~1350℃)对钛铝靶材性能的影响。结果表明,在保温时间均为2 h,保压压力均为130 MPa时,当烧结温度为1250℃时所制备的钛铝合金靶材综合性能最好,靶材的致密度为99.72%,晶粒尺寸为78.70μm,维氏硬度为399.7HV,Ti元素和Al元素均匀分布。通过晶粒生长动力学方程计算出钛铝靶材的晶粒长大激活能为76.4 KJ/mol。

In this paper,titanium aluminum alloy target(Ti:Al=1:1,at%)is prepared by hot isostatic pressing process.The effect of sintering temperature(1150~1350°C)on the properties of titanium aluminum target is studied.The result suggested that the excellent performance of the TiAl alloy target prepared at the sintering temperature at 1250°C when the holding time is 2h and the holding pressure is 130MPa,the relative density of target is 99.72%,the average grain size is 78.70μm,vickers hardness is 399.7HV,Ti and Al elements are uniformly distributed in the target.The grain growth activation energy of TiAl target is calculated to be 76.4KJ/mol by the Brook dynamic model of grain growth.