30at%铝钪合金靶材的制备与显微组织

Microstructure and preparation of the 30at% Aluminum scandium target

为解决传统粉末冶金制备30at%铝钪靶材难度大、杂质高、合金分相、致密度低等问题,以高纯单质Al、Sc为原料,采用真空磁悬浮熔炼-水冷浇铸-气雾化-热压烧结工艺制备30at%铝钪合金材料,并研究了微量Sc含量变化对靶材的XRD,微观形貌以及Al_2Sc和Al_3Sc比例影响;用氧氮分析仪、ICP-OES分析仪对靶材的氧含量、杂质进行了测定,用SEM、XRD对靶材块体的微观形貌、物相结构进行了表征。测试结果显示:采用真空磁悬浮熔炼-水冷浇铸-气雾化-热压烧结工艺制备了氧含量小于1500ppm,纯度大于3.5N,Al_3Sc和Al_2Sc两相结构,且铝钪粒子平均晶粒小于20m,致密度大于99%的铝钪靶材,当靶材Sc含量从30at%升高到30.5at%时,Al_2Sc与Al_3Sc的比例从60:40变为66:34,Al_2Sc比例升高,Al_3Sc明显降低,靶材镀膜后薄膜100w应力降低。

In order to solve the problems of high oxygen content,high impurities,alloy phase separation and low density in the traditional powder metallurgy preparation of 30at%Al Sc target,a 30at%Al Sc alloy material was prepared with high-purity elemental Al and Sc as raw materials by the process of suspension melting water cooling casting gas atomization and hot pressing.The influence of the change of trace Sc content on the X R D,micro morphology and Al2Sc and Al3Sc ratio of the target was studied;The oxygen content and impurities of the target were measured by oxygen nitrogen analyzer,ICP-OES analyzer.The micro morphology and phase structure of the target block were characterized by SEM and X-ray diffraction.The test results show that 30at%aluminum scandium targets with oxygen content less than 1500ppm,purity than 3.5N,just Al3Sc and Al2Sc two-phase structure,average grain size of aluminum scandium particles less than 10μm,and density greater than 99%were prepared by suspension melting,water-cooled casting,gas atomization and hot-pressing sintering process.When the Sc content in the target increased from 30at%to 30.5at%,the ratio of Al2Sc to Al3Sc changed from 60:40 to 66:34,Al2Sc ratio increased,Al3Sc decreased significantly,and target 100W stress decreased.