SUS321不锈钢表面Cr/CrN涂层的制备与抗氧化及耐腐蚀研究

Research on Preparation,Oxidation Resistance and Corrosion Resistance of Cr/CrN Coating on SUS321 Stainless Steel Surface

采用磁控溅射技术,在SUS321不锈钢表面制备Cr/Cr N涂层,利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)及分析天平等分别表征样品高温氧化及酸性盐雾腐蚀实验后的微结构及增重。结果表明,当磁控溅射气体分压比为P_(Ar)/P_(N_(2))=3∶1的涂层样品抗氧化性能及耐腐蚀性能最佳。在此基础上通过循环沉积制备了多层Cr/CrN涂层,6周期涂层样品在600℃氧化200 h后的单位面积增重为3.599 g/m^(2),表面氧化膜致密,没有出现剥落现象;6周期的涂层样品在酸性盐雾环境中能够保持480 h表面无变化,在放置500 h后边缘部位才开始出现轻微锈迹。固定磁控溅射气体分压比为P_(Ar)/P_(N_(2))=3∶1时,制备的6周期Cr/CrN多层膜涂层具有最佳的抗氧化及耐酸性盐雾腐蚀性能。

Cr/CrN coatings were prepared on the surface of SUS321 stainless steel using magnetron sputtering technology.The microstructure and weight gain of samples after high-temperature oxidation and acidic salt spray corrosion experiments were characterized using scanning electron microscopy(SEM),X-ray diffraction(XRD)and analytical balance.The results show that the sample with a magnetron sputtering pressure ratio of P_(Ar)/P_(N_(2))=3∶1 exhibits the best antioxidation and corrosion resistance.Based on this,multi-layer Cr/CrN coa tings are prepared through cyclic deposition.The sample with 6-cycle coatings has a weight gain of 3.599 g/m^(2)after oxidation at 600℃for 200 h,with a dense surface oxide film and no peeling observed.In an acidic salt spray environment,the sample with a 6-cycle coating has no obvious oxidation for 480 h,and generates slight rust only at the edge after oxidation for 500 h.The 6-cycle Cr/CrN multilayer film coating prepared with a fixed magne tron sputtering pressure ratio of P_(Ar)/P_(N_(2))=3∶1 exhibits the best antioxidation and resistance to acidic salt spray corrosion.