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连续真空蒸发法制备CsPbBr_(3)薄膜及其X射线探测性能的分析

Analysis of Preparation of CsPbBr_(3)Thin Films by Continuous Vacuum Evaporation Method and X-ray Detection Performance
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摘要 阐述采用连续蒸发法制备一定厚度的CsPbBr_(3)薄膜并用于X射线探测。研究CsBr层和PbBr2层的厚度比对CsPbBr_(3)薄膜物性的影响。结果表明,在厚度比为0.85时,可获得纯立方相结构的CsPbBr_(3)薄膜,并通过衬底原位加热的方式有效解决薄膜出现龟裂而脱落的问题,同时促进薄膜晶粒的长大。制备的CsPbBr_(3)薄膜X射线探测器的光电流与X射线剂量率之间呈现出良好的线性关系。器件的线性灵敏度达1223μCGy^(-1)cm^(-2)。 This paper describes the preparation of CsPbBr_(3)thin films with a certain thickness using continuous evaporation method and their application in X-ray detection.Study the effect of thickness ratio of CsBr layer and PbBr_(2)layer on the physical properties of CsPbBr_(3)thin films.The results indicate that a pure cubic structured CsPbBr_(3)film can be obtained at a thickness ratio of 0.85,and the problem of film cracking and detachment can be effectively solved by in-situ substrate heating,while promoting the growth of film grains.There is a good linear relationship between the photocurrent and X-ray dose rate of the CsPbBr_(3)thin film X-ray detector prepared.The linear sensitivity of the device reaches 1223μCGy^(-1)cm^(-2).
作者 汪毅 徐海涛 姚博 方泽波 WANG Yi;XU Haitao;YAO Bo;FANG Zebo(Zhejiang Engineering Research Center for Microelectromechanical Systems,Shaoxing University of Arts and Sciences,Zhejiang 312000,China)
出处 《电子技术(上海)》 2024年第3期16-18,共3页 Electronic Technology
基金 国家自然科学基金(11905133) 浙江省自然科学基金(LQ19F040002) 浙江省基础公益研究计划项目(LGG21F050001)。
关键词 真空蒸发法 CsPbBr_(3)薄膜 X射线探测器 vacuum evaporation method CsPbBr_(3)thin film X-raydetector
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