掺硼大单晶金刚石制备及其刀具切削温度在线检测研究

Fabrication of Boron-Doped Large Single-Crystal Diamond and Investigation of Online Cutting Temperature Detection for Diamond Tools

为了实时测量单晶金刚石刀具加工区域的温度和实时监测金刚石刀具超精密加工工件表面的质量,利用掺硼金刚石的半导体性质,建立掺硼金刚石电阻与温度的对应关系,得出其测量灵敏度为6.2Ω/℃;利用所研制的掺硼单点金刚石刀具在金刚石车床上分别对聚甲基丙烯酸甲酯(PMMA)和碳纤维增强塑料(CFRP)试件进行了单点金刚石刀具(SPDT)的切削温度测量,实验验证了所研制的掺硼金刚石刀具切削温度测量系统能够灵敏地测量精密切削过程中的切削温度;金刚石刀具切削CFRP试件时,切削温度和加工表面形貌出现周期性的变化,这一发现对于指导单点金刚石刀具超精密表面加工状态的在线监测也很有价值。

To enable real-time measurement of the cutting temperature in the cutting zone of single-crystal diamond tools and real-time monitoring of the surface quality of workpieces during ultra-precision machining with diamond tools,the semiconductor properties of boron-doped diamond were leveraged.The relationship between electrical resistance and temperature was established,revealing a measurement sensitivity of 6.2Ω/℃.The developed boron-doped single point diamond tools were deployed on a diamond turning machine to measure the cutting temperatures during single point diamond turning(SPDT)of polymethyl methacrylate(PMMA)and carbon fiber reinforced polymer(CFRP)workpieces.The experiments validated that the boron-doped diamond tool cutting temperature measurement system could sensitively measure the cutting temperature throughout the precision machining process.Notably,during the cutting of CFRP workpieces,periodic variations in both cutting temperature and machined surface topography were observed.This finding holds significant value for guiding online monitoring of the ultra-precision machining state when employing single point diamond tools.