位置探测器与加速度计结合的测振方法

Vibration Measurement Method Based on Position Sensitive Detector and Accelerometer

非接触式的振动测量方法具有非侵入和易布置的优点,在实际的工业生产和科研实验中有广泛的应用,但目前的非接触测量方式对测量装置自身受环境冲击振动产生的影响考虑较少。文中提出了一种振动自补偿的低成本的测振方法,采用位置探测器测量振动信号,并利用MEMS加速度计测量测振系统自身振动用于补偿。搭建实验系统对该方法进行了验证。实验结果表明:基于位置探测器的方法能够测量待测物体与测振系统间的振动,而MEMS加速度计能够测量环境引起的测振系统自身振动。经补偿后,环境振动冲击对使用位置探测器方法得到的振动测量结果的影响显著减弱。

Non-contact vibration measurement methods,which are non-invasive and can be easily arranged,are widely used in industrial production and scientific research experiments.However,these methods seldom take into consideration the impact caused by shocks from the environment on the measurement system.In this paper,a low-cost vibration measurement method of vibration self-compensation was proposed.A position-sensitive detector was used to measure the vibration signal,while a MEMS accelerometer was used to compensate for the vibration of the measurement system itself.An experimental system was built to verify this method.The results show that the relative vibration between the measurement system and the target can be acquired with a position sensitive detector,while the vibration of the system induced by environment changes or shocks can be measured with a MEMS accelerometer.The performance of the vibration measurement system suffering from environmental shocks based on the position-sensitive detector has been significantly improved after the compensation of the MEMS accelerometer.