摘要
Fluid lubricated bearings have been widely adopted as support components for high-end equipment in metrology,semiconductor devices,aviation,strategic defense,ultraprecision manufacturing,medical treatment,and power generation.In all these applications,the equipment must deliver extreme working performances such as ultraprecise movement,ultrahigh rotation speed,ultraheavy bearing loads,ultrahigh environmental temperatures,strong radiation resistance,and high vacuum operation,which have challenged the design and optimization of reliable fluid lubricated bearings.Breakthrough of any related bottlenecks will promote the development course of high-end equipment.To promote the advancement of high-end equipment,this paper reviews the design and optimization of fluid lubricated bearings operated at typical extreme working performances,targeting the realization of extreme working performances,current challenges and solutions,underlying deficiencies,and promising developmental directions.This paper can guide the selection of suitable fluid lubricated bearings and optimize their structures to meet their required working performances.
基金
supported by the National Natural Science Foundations of China under Grant Nos.52206123,52075506,52205543,52322510,52275470 and 52105129
Science and Technology Planning Project of Sichuan Province under Grant No.2021YJ0557
Natural Science Foundation of Sichuan Province under Grant No.2023NSFSC1947
Presidential Foundation of China Academy of Engineering Physics
Grant No.YZJJZQ2022009。