大抽速氙气泵优化设计研究

Study on optimal design of xenon air pump with high pumping speed

介绍了500 mm口径大抽速氙气泵的抽气原理、结构、一级冷板优化设计和抽速测试。通过氙气和氮气抽气速率测试对比,该款大抽速氙气泵的氙气抽速与氮气抽速相近,实际抽速高达10 500 L/s,抽氙速率提高了1倍以上。大抽速氙气泵除了具有较优的抽氙性能,同时具备常规低温泵所有性能。该泵可一泵多用,为客户节约了采购和安装成本。

The pumping principle,structure,optimization design of the first-stage cold plate and pumping speed test of the 500 mm caliber high-speed xenon cryopump were introduced.Through the test comparison of xenon and nitrogen pumping rates,the xenon and nitrogen speed of this high-pumping xenon pump are similar.The actual performance of pumping xenon speed is up to 10500 L/s,which is twice that of conventional cryopumps for xenon.In addition to the excellent xenon pumping performance,the high-speed xenon pump has all the performance of conventional cryopumps.The pump can be used for multiple purposes,saving procurement and installation costs for customers.