能量场辅助激光诱导等离子体加工透明硬脆材料的研究现状及发展趋势

Research Status and Development Trends for Energy Field-assisted Laser Induced Plasma-assisted Ablation of Transparent Brittle Materials

能量场辅助激光诱导等离子体加工技术是一种新兴的制造技术。基于传统的激光加工技术,通过引入热场、电场、磁场、化学场等能场进行创新,提高激光加工过程的可控性,不仅实现了透明硬脆材料纳米级甚至亚纳米级高精度制造,也有利于满足超精密制造的高质量、低损伤要求。从热场、磁场、电场、化学场分别具体阐述了不同的能量场辅助对激光加工技术的影响,通过分析激光机理和能量场辅助机理总结热场、电场、磁场和化学场对激光加工中的热能、光能、动能和表面能的影响原理,并介绍了能量场辅助激光加工的设备及工艺方法,最后总结能量场辅助激光加工技术目前存在的不足及未来面临的挑战,为进一步发展多能场复合辅助激光诱导等离子体加工技术奠定基础。

Energy field-assisted laser processing technology is a developing manufacturing technique that combines traditional laser processing with innovative approaches involving thermal,electric,magnetic,and chemical fields to enhance the controllability of the laser machining process.This integration has not only enabled the high-precision manufacturing of transparent hard brittle materials at the nano and even sub-nano scale but has also been beneficial in meeting the stringent requirements of ultra-precision manufacturing,ensuring high quality and low damage.A specific elucidation of the effects of different energy field assistance,namely thermal,magnetic,electric,and chemical fields,on laser processing technology is provided.Through an analysis of the laser mechanism and the principles of energy field assistance,the impact of thermal,electric,magnetic,and chemical fields on thermal energy,optical energy,kinetic energy,and surface energy within laser processing is summarized.Moreover,the equipment and process methods employed in energy field-assisted laser processing are introduced.Finally,an overview of the current limitations and future challenges facing energy field-assisted laser processing technology,laying the groundwork for further development of multi-field composite-assisted laser processing techniques is presented.