基于SSPPs传感器的金属凹槽填充工件检测

Detection of metal groove filling workpiece based on SSPPs sensor

提出了一种基于液体开关控制的人工表面等离激元传感器,用于检测金属凹槽填充密度。该传感器由液体开关控制器和功分结构组成。液体开关由塑料管和带水的注射器组成,固定在SSPPs传感器的分支结构上。塑料管内充满水时,支路不能传输信号,这称为“OFF”状态。相反,塑料管内无水时称为“ON”状态。通过切换传感器支路的“ON”或“OFF”状态,可以控制SSPPs传感器的传感区域。该检测方法是基于凹槽填充质量变化引起的SSPPs传感器反射系数的变化,通过切换支路状态,可以检测各支路下方是否存在填充质量问题。实验结果表明,SSPPs传感器可以有效检测10 mg填充变化,可用于实现批量生产工件的快速筛选。

A spoof surface plasmon polaritons(SSPPs) sensor based on liquid switch control is proposed to detect metal groove filling density.The sensor consists of liquid switch controllers and power division structure.The liquid switch consists of a plastic pipe and syringe with water,which is fixed on the branch structure of SSPPs sensor.By filling the plastic pipe with water,the branch cannot transmit signal,which is called “OFF” state.In contrast,when there is no water in the plastic tube,it is called “ON” state.By switching the “ON” or “OFF” state of sensor's branches,it can control the sensing area of SSPPs sensor.The detection method is based on the change of reflection coefficient of SSPPs sensor caused by the change of groove filling quality.By switching the states of branches in turn,it can detect whether whether there are filling quality problems at each branch.The experimental results show that the SSPPs sensor can effectively detect the filling changes of 10 mg,which can be used for rapid detection of workpiece with mass production.