鞘层电容对快速扫描双探针伏安曲线的影响

Effect of sheath capacitance on the I-V characteristics of fast sweeping double Langmuir probe

建造了基于多偶极腔体热阴极放电形式搭建的500kHz不对称快速扫描双探针系统,以电容对测量结果的影响进行实验研究。对不同扫描频率下不同尺寸的快速扫描不对称朗缪尔双探针受离子饱和电流及鞘电流影响的结果进行了对比分析。这项研究对于不同扫描频率下快速扫描不对称双探针的选择应用有着参考和指导意义。

A 500kHz asymmetric fast sweeping double probe system based on multi-dipole confined hot cathode discharge was constructed to experimentally investigate the effect of capacitance on measurement results.The results of fast sweeping asymmetric Langmuir double probe with different size effected by the ion saturation current and sheath current at different sweeping frequency are compared and analysed.This research provides a reference and guide for the selection and application of fast sweeping asymmetric double probes at different sweeping frequency.