(Ag,Cu)/TiO_(2)汽车玻璃隔热膜的制备与表征

Preparation and Characterization of(Ag,Cu)/TiO_(2) Automotive Glass Thermal Insulation Film

利用磁控溅射技术制备由金属(Ag,Cu)膜、介质层TiO_(2)膜组成的双层汽车玻璃隔热膜样品。利用单因素分析法考察了溅射时间、溅射功率和Ar溅射流量三个因素对(Ag,Cu)/TiO_(2)汽车玻璃隔热膜透光隔热性能的影响。实验结果表明,在在本底真空度3×10^(-3) Pa,溅射气压2.1 Pa条件下,靶基距均为70 mm时,金属(Ag,Cu)膜溅射时间18 s,溅射功率80 W,Ar溅射流量20 sccm;介质层TiO_(2)膜溅射时间50 min,溅射功率115 W,溅射流量25 sccm时,(Ag,Cu)/TiO_(2)汽车玻璃隔热膜的透光隔热性能最佳。

Magnetron sputtering technology was used to prepare double-layer automotive glass insulation film samples composed of metal(Ag,Cu)film and dielectric layer TiO_(2) film.The single factor analysis method was used to examine the effects of three factors:sputtering time,sputtering power and Ar sputtering flow rate on the light-transmitting and heat-insulating properties of(Ag,Cu)/TiO_(2) automotive glass insulation films.The experimental results showed that when the background vacuum degree was 3×10^(-3) Pa,the sputtering pressure was 2.1 Pa,the target-base distance was 70 mm,the metal(Ag,Cu)film sputtering time was 18 s,and the sputtering power was 80 W.When the Ar sputtering flow rate was 20 sccm,the dielectric layer TiO_(2) film sputtering time was 50 min,the sputtering power was 115 W,and the sputtering flow rate was 25 sccm,the(Ag,Cu)/TiO_(2) automotive glass insulation film had the best light-transmitting and heat-insulating performance.