摘要
半导体行业是当今世界科技创新的重要驱动力,也是体现各国竞争力的重要标志。半导体材料作为半导体行业的核心,其性能的高低直接决定了半导体产业的技术水平。人造金刚石自问世以来,即以其优异的半导体特性,被赋予了“终极半导体”的美誉。然而,经过近半个世纪的发展,金刚石材料的半导体应用之路仍然是“路漫漫其修远兮”,既面临高质量金刚石半导体材料的生长加工难题,也有金刚石半导体器件设计的关键瓶颈等亟待攻克的技术难题。本文针对金刚石半导体在材料和器件方面的特性、潜在应用、主要研究进展,以及目前面临的一些瓶颈问题进行讨论。
The semiconductor industry is an important driving force for technological innovation in today's world,and it is also an important indicator of the competitiveness of various countries.As the core of the semiconductor industry,the performance of semiconductor materials directly determines the technological level of the semiconductor industry.Diamond is known as the ultimate semiconductor material due to its superior properties,and it is expected to be used in next-generation power electronic devices.However,after nearly half a century of development,the diamond semiconductor device has not been realized,due to obstacles in the growth and processing of high-quality diamond materials,as well as difficulties in device design using diamond.This paper mainly focuses on the properties,potential applications,prominent research progress,and current bottleneck issues of diamond semiconductors in terms of materials and devices.It is gratifying that in recent years,diamond semiconductor technology has grown rapidly,and the ultimate diamond semiconductor is worth looking forward to emerging in the near future!
作者
高旭辉
Gao Xuhui(University of Science and Technology Beijing,Beijing 100083,P.R.China)