一种新型高精度互感式位移传感器

A New High-Precision Mutual Inductance Displacement Sensor

提出了一种采用差分结构设计,硅钢片作为铁芯的双E型互感式差分位移传感器,分析了该传感器的基本原理并采用有限元仿真得到传感器最佳线性度时对应的线圈匝数,相对于传统双U型结构,双E型互感式差分位移传感器的测量范围更大,线性度更好。原理样机的试验结果表明,当磁浮飞轮转子间隙在0~1.5 mm之间线性变化时,双E型互感式差分位移传感器的线性度为3.87%,满足磁浮飞轮转子位移测量要求。另外,双E型互感式差分位移传感器还具有结构简单,价格低廉,便于安装的优点。

A double E-shaped mutual inductance differential displacement sensor with differential structure design and silicon steel sheet as core is proposed.The basic principle of the sensor is analyzed,and the corresponding coil turns at optimal linearity of the sensor are obtained by finite element simulation.Compared with traditional double Ushaped structure,the double E-shaped mutual inductance differential displacement sensor has larger measuring range and better linearity.The experimental results of prototype show that the linearity of double E-shaped mutual inductance differential displacement sensor is 3.87%when the rotor clearance of maglev flywheel changes linearly between 0 and 1.5 mm,meeting the requirements of rotor displacement measurement of the flywheel.In addition,the double E-shaped mutual inductance differential displacement sensor also has the advantages of simple structure,low price and easy installation.