电子级超纯水制备用离子交换树脂产品研究进展

Research Progress on Ion Exchange Resin Product for the Preparation of Ultrapure Water in Electronic Grade

随着我国芯片产业的快速发展,电子级超纯水需求巨大。然而,电子级超纯水制备用的离子交换树脂产品长期依赖进口。尽管我国是离子交换树脂生产的大国,但传统的离子交换树脂产品难以达到电子级超纯水制备用的要求。本文在梳理我国传统离子交换树脂的基本情况、生产工艺、标准体系的基础上,围绕电子级超纯水制备对离子交换树脂的需求,对比国内外产品指标,综述了电子级超纯水制备用离子交换树脂产品研究进展。

With the rapid development of the chip industry in china,there is a huge demand for ultrapure water in electronic-grade.However,ion exchange resin products used in the preparation of the ultrapure water have long relied on the imports.Although China is a major country in the production of ion exchange resins,traditional ion exchange resin products are difficult to meet the requirements for the preparation of ultrapure water in electronic-grade.This work reviews the research progress on ion exchange resin products for the preparation of ultrapure water in electronic-grade on the basis of the basic situation,production process,and standard system of traditional ion exchange resins in China.