集成电路制造装备发展现状及展望

Development Status and Prospect of Integrated Circuit Manufacturing Equipment

集成电路制造产业是现代电子信息产业的核心,是实现中国制造的重要技术和产业支撑,对加快工业转型升级具有重要的战略意义。集成电路制造装备作为集成电路制造产业链中的关键环节,是实现技术突破和产业升级的基础。全球集成电路装备正朝着更先进工艺、更小制程方向发展。随着全球贸易战、科技战愈加复杂,国内集成电路制造装备产业更需要走自主可持续发展道路,提升战略竞争力和国际地位。分析了国内集成电路制造装备发展现状,并结合政策、行业态势研究,指出国产装备现阶段发展现状、发展机遇及建议,助力推动我国集成电路制造装备的技术创新和产业升级。

The integrated circuit manufacturing industry is the core of modern electronic information industry,an important technology and industrial support for achieving Chinese manufacturing,and has important strategic significance for accelerating industrial transformation and upgrading.As a key link in the integrated circuit manufacturing industry chain,integrated circuit manufacturing equipment is the basis for achieving technological breakthroughs and industrial upgrading.Global integrated circuit equipment is developing towards more advanced technology,smaller process.With the increasing complexity of global trade and technology wars,the domestic integrated circuit manufacturing equipment industry needs to take the road of independent sustainable development,enhance strategic competitiveness and international status.The current development status of domestic integrated circuit manufacturing equipment is analyzed.Combined with policies and industry trends,the current development status,opportunities and suggestions of domestic equipment is pointed out,so as to help promote technological innovation and industrial upgrading of integrated circuit manufacturing equipment in China.