摘要
针对光刻机等高精确度定位平台无摩擦、无接触、无噪声需求,提出一种采用动子无源型平移和悬浮一体化Halbach磁悬浮永磁直线电机以实现定位平台的无摩擦悬浮及长距离定位运动。为了精确分析该类电机的悬浮力和推力特性,提出一种考虑动子永磁体端部效应的电机磁场解析模型并采用傅里叶分解法得到Halbach阵列永磁体磁场解析式。基于此磁场解析模型,通过洛伦兹力法得到了动子电磁力解析模型,并基于正交分解法推导了电机悬浮力和推力解耦的电磁力模型。结合有限元仿真对建立的电磁模型进行了对比验证,在此基础上,设计并制作了一台10极12槽样机,通过搭建实验平台进行推力和悬浮力测试,将实验测试值与有限元仿真值和解析值对比验证了所提出方法的准确性和快速性。
A passive mover Halbach maglev permanent magnet linear synchronous motor was to used achieve frictionless levitation and long-distance positioning motion of the positioning platform for high-precision positioning platforms such as lithography.In order to accurately analyze the levitation and thrust characteristics of these motors,an analytical model of the magnetic field of the motor was proposed,taking into account the end effect of the permanent magnets,and the Fourier decomposition method was used to obtain the analytical equation of the magnetic field.Based on this analytical model,the electromagnetic force was obtained by the Lorentz force method,and an electromagnetic force model based on the d-q decoupling was derived to decouple the suspension force and thrust force.Based on this,a 10-pole 12-slot prototype was designed and fabricated to test the thrust and suspension forces by building an experimental platform.
作者
张予希
颜建虎
池松
周旭
郭保成
ZHANG Yuxi;YAN Jianhu;CHI Song;ZHOU Xu;GUO Baocheng(School of Automation,Nanjing University of Science and Technology,Nanjing 210094,China;School of Electrical and Automation Engineering,Nanjing Normal University,Nanjing 210023,China)
出处
《电机与控制学报》
EI
CSCD
北大核心
2024年第6期143-151,共9页
Electric Machines and Control
基金
国家自然科学基金青年基金项目(51907027)。
