摘要
本文对接触(触针)式表面轮廓测量仪的两种校准方法进行比较。两种校准方法的相同点:两种校准方法都对仪器固有参数,如静态测量力、轮廓垂直分量(Z轴)和水平分量(X轴)进行校准。两种校准方法存在的差异:福建地方校准规范规定的方法是在固有参数基础上将轮廓仪软件系统里的直线度、弧度、角度等参数进行校准,系统地反映仪器特性;而京津冀地方校准规范规定的方法是采用量块和平晶作为标准,利用其具有的研合性对轮廓仪软件系统的阶梯参数进行校准。由于轮廓仪软件系统的直线度、弧度、角度、阶梯等参数都是依据Z轴分量和X轴分量进行数据分析计算而来。因此,只要确保Z轴和X轴分量的示值准确,则轮廓仪其他参数示值也就准确。采用这两种方法对同一台轮廓仪进行校准并分析试验数据,印证了两种校准方法的测量结果都可信。
This article compares two calibration methods for contact(stylus)type surface contour tester.The commonality between the two methods is that both calibrate the instrument's intrinsic parameters,such as static measuring force,the vertical component of the profile(Z-axis),and the horizontal component(X-axis).The differences between the two methods lie in the following:the Fujian local calibration standard specifies a method that calibrates parameters within the profilometer's software system,such as straightness,curvature,and angles,on the basis of the intrinsic parameters to systematically reflect the instrument's characteristics.On the other hand,the calibration standard for the Jing-Jin-Ji(Beijing-Tianjin-Hebei)region involves using gauge blocks and a plane-parallel glass as standards,leveraging their fitting property to calibrate the step parameters of the profilometer's software system.Since the parameters of the profilometer's software system,including straightness,curvature,angles,and steps,are all derived from data analysis and calculation based on the Z-axis and X-axis components,ensuring the accuracy of the indications of the Z-axis and X-axis components will also ensure the accuracy of other parameter indications of the profilometer.By calibrating the same profilometer using these two methods and analyzing the experimental data,it is confirmed that the measurement results from both calibration methods are reliable.
作者
田华
TIAN Hua(Ningxia Metrology Quality Inspection and Testing Institute,Yinchuan 750200,China)
