MEMS电磁致动机构多物理场耦合仿真与分析

Multi-Physical Fields Coupling Simulation and Analysis of MEMS Electromagnetic Actuation Mechanism

为了解决电磁致动机构多物理场之间相互影响不明的问题,建立了电磁-结构多物理场耦合模型,并对微机电系统(Microelectromechanical System,MEMS)电磁致动机构的驱动特性进行了仿真研究。首先,以电压作为激励源,将磁矢势作为因变量引入,得到驱动器整体的磁场分布,实现电磁场耦合。然后通过麦克斯韦应力张量法得到滑块所受的电磁力,并作为载荷施加在滑块上进行瞬态动力学分析,实现电磁-结构场耦合,从而实现电磁致动机构的多物理场耦合仿真。最后,进一步研究了不同输入条件下电磁致动机构的驱动特性,阐明了响应时间、位移速度、最大电磁力和位移等不同输出条件的变化规律,分析了电压对驱动特性的影响,从而为MEMS电磁致动机构设计与驱动特性研究提供指导。

In order to solve the problem that the interaction between the multi-physical fields of the electromagnetic actuation mechanism is unknown,an electromagnetic-structural multi-physical fields coupling model is established,and the driving characteristics of the microelectromechanical system(MEMS)electromagnetic actuation mechanism are simulated.Firstly,the voltage is used as the excitation source,and the magnetic vector potential is introduced as the dependent variable to obtain the overall magnetic field distribution of the driver and realize the electromagnetic field coupling.Then,the electromagnetic force of the slider is obtained by the Maxwell stress tensor method,and applied as a load on the slider for transient dynamic analysis to realize the electro magnetic-structural field coupling,so as to realize the multi-physical fields coupling simulation of the electromagnetic actuation mechanism.Finally,the driving characteristics of electromagnetic actuation mechanism under different input conditions are further studied.The variation rules of different output conditions such as response time,displacement velocity,maximum electromagnetic force and displacement are clarified.The influence of voltage on driving characteristics is analyzed,which provides guidance for the design and driving characteristics study of MEMS electromagnetic actuation mechanism.