球磨工艺对机械合金化制备AlN涂层的影响

Effect of Ball Milling Process on Preparation of AlN Coating by Mechanical Alloying

在金属Al基板表面制备AlN涂层可结合两者优势,使得复合基板具有优异的导热性、绝缘性以及与芯片匹配的热膨胀系数,有望获得大规模应用。本文采用表面机械纳米合金化工艺在铝表面制备AlN涂层,使用光学显微镜,扫描电子显微镜等设备对系统地研究了工艺参数对其结构的影响,分析了涂层形成过程及相关作用机理。同时,为了减缓Al基体与AlN涂层之间的不匹配性,还设计并制备了W-Al中间过渡层,并通过优化工艺参数对中间过渡层的结构进行了调控。

The preparation of AlN coating on the surface of metal Al substrate can combine both advantages,making the composite substrate have excellent thermal conductivity,insulation and thermal expansion coefficient matching with the chip,which is expected to obtain large-scale application.The surface mechanical nano-alloying process was used to prepare AlN coating on the aluminum surface,using optical microscope,scanning electron microscope and other equipment to systematically study the influence of process parameters on its structure,and analyze the coating formation process and related mechanism of action.At the same time,in order to reduce the mismatch between Al matrix and AlN coating,W-Al intermediate transition layer was designed and prepared,and the structure of the intermediate transition layer was regulated by optimizing the process parameters.