超低膨胀玻璃的发展及应用

Development and Application of Ultra-low Expansion Glass

超低膨胀玻璃在室温区间下具有近零的热膨胀系数,作为天文望远镜反射镜、精密光路系统的光学元件、激光陀螺仪谐振腔体等部件在空间光学、精密测量、光刻等领域发挥重要作用。通过介绍国内外超低膨胀玻璃的发展历程,系统阐述了超低膨胀微晶玻璃、超低膨胀合成石英玻璃的结构、性能与制备方法及其应用场景,为超低膨胀玻璃的研究发展提供了参考。

Ultra-low expansion glass has a near-zero coefficient of thermal expansion in the room temperature range and is used as components of astronomical telescope mirrors,optical elements of precision optical path systems and resonant cavities of laser gyroscopes.It plays an important role in space optics,precision measurement,photolithography and other fields.In this paper,the development history of ultra-low expansion glass at home and abroad is introduced,and the structure,properties,preparation methods and application scenarios of ultra-low expansion glass-ceramics and ultra-low expansion synthetic quartz glass are systematically described,which provides a reference for the research and development of ultra-low expansion glass.