TOPCon电池中的EL卡点印缺陷分析

Analysis of EL Card Dot Print Defects in TOPCon Batteries

阐述PE-Poly是N型TOPCon太阳电池工艺中的难点与关键,电致发光(EL)卡点印是PE-Poly路线TOPCon电池主要缺陷之一。基于PE-poly路线TOPCon电池量产设备和工艺,通过电性能测试、椭偏仪测试、QE测试以及对比实验,针对此类电池EL缺陷问题进行分类研究,为电池片制程良率提升提供改善方向。

This paper describes the difficulty and key of PE Poly in the N-type TOPCon solar cell process,and electroluminescence(EL)checkpoint printing is one of the main defects of the PE Poly route TOPCon battery.Based on the PE poly route TOPCon battery mass production equipment and process,it conducts classification research on EL defects in such batteries through electrical performance testing,ellipsometer testing,QE testing,and comparative experiments,providing improvement directions for improving the process yield of battery cells.