微电子技术在MEMS系统中的应用

Application of Microelectronics Technology in MEMS Systems

阐述微电子技术具备性能好、精度高、能耗低的特点,探讨其在MEMS中的应用,包括在刻蚀技术、扩散技术、沉淀技术、固相键合技术、MEMS技术、LIGA工艺中的应用。

This paper expounds the characteristics of good performance,high accuracy,and low energy consumption of microelectronics technology,and explores its applications in MEMS,including etching technology,diffusion technology,precipitation technology,solid-state bonding technology,MEMS technology,and LIGA process.