抗高过载加速度计失效定位与故障复现

Fault Localization and Recurrence of Anti-high Overloads Accelerometers

随着硅微机械系统技术的不断发展成熟,抗高过载加速度计已广泛应用于航空航天、兵器测试等振动冲击过程中加速度的测量,然而上万g乃至十万g以上的高过载对芯片的内部结构以及加速度计的封装提出了更高的要求。因此,运用多种失效分析手段,结合自制的抗高过载加速度计介绍了一种典型的断裂失效模式并进行了复现,最后给出了相应的使用建议。

With the continuous development and maturity of silicon micro mechanical system technology,the anti-high overload accelerometers have been widely used for measuring acceleration in vibration and impact processes such as aerospace and weapon testing.However,high overloads of tens of thousands or even hundreds of thousands of grams posed higher requirements for the internal structure of chips and the packaging of accelerometers.By using various failure analysis methods and combining self-made anti-high overload accelerometers,we introduced a typical fracture failure mode and reproduced it,and finally provided corresponding usage suggestions.