退火对电流体喷印线圈磁敏特性的影响

Effect of Annealing on Magnetic Sensitivity of Coils Prepared by Electro-Hydrodynamic Printing

研究了热退火对不同电流体喷印方式制备的微纳金属线圈磁感应特性的影响。首先,仿真分析了不同线圈参数对线圈电感性能的影响,设计了磁敏线圈结构;然后,使用电流体喷印设备进行线圈制备,并利用磁场发生及检测系统对喷印线圈进行性能表征;最后,对比了相同条件下(真空,300℃)退火前后不同电流体喷印方式制备的微纳金属线圈在均匀交变磁场下的感应电动势随激励电压/电流的变化规律。实验结果表明,退火后的线圈表现出更为优秀的导电性,并分析了其变化机制。为基于电流体喷印技术的微纳磁敏线圈制备提供了有益思路。

This study focuses on the effect of thermal annealing on the magnetic sensitivity characteristics of micro/nano metal coils prepared by different electro-hydrodynamic jet printing modes.Firstly,the influence of different coil parameters on the inductance performance of the coil is simulated,and a planar magnetic coil structure is designed.Next,the coil is printed by an electro-hydrodynamic jet printing equipment,and the performance of the printed coil is characterized by a magnetic field generation and detection system.Finally,the magnetic induction characteristics of micro-nano metal coils prepared by different electro-hydrodynamic jet printing methods before and after heat annealing under the same condition(vacuum,300°C)are compared under a uniform alternating magnetic field.The variation of the induced electromotive force with the excitation voltage/current is analyzed.The experimental results show that the coil exhibits better electrical conductivity after the annealing under the same excitation conditions,and the change mechanism is addressed.This paper provides an idea for the preparation of micro/nano magnetic sensitive coils based on electro hydrodynamic jet printing technology.