TRIZ方法在PECVD设备流热场改进中的应用

Application of TRIZ Method in Improving Flow Heat Field of PECVD Equipment

PECVD是太阳能电池加工过程中的重要设备,其内部热流场的均匀性对太阳能电池表面薄膜的均匀性影响很大。本文使用TRIZ(发明问题解决理论)对PECVD设备的热流场进行分析,提出TRIZ可作为流体仿真的重要补充。同时提出流热场问题不仅涉及流的传导、使用和分配问题,还涉及浓度不均、压力不均和工作效率低的问题,建议总结前人解决方法并将其纳入TRIZ流相关知识体系,以助于工程师参考解决类似问题。

PECVD is an important equipment in the process of solar cell processing,and the uniformity of the internal heat flow field has a great influence on the uniformity of the film on the surface of the solar cell.In this paper,TRIZ(Invention problem Solving theory)is used to analyze the heat flow field of PECVD equipment,and TRIZ can be used as an important supplement for fluid simulation.At the same time,it is pointed out that the problem of flow heat field not only involves the conductivity disadvantages,utilization disadvantages and flow partion disadvantages,but also involves the disadvantages of uneven concentration,uneven pressure and low use efficiency.It is suggested to summarize the previous solutions and incorporate them into the TRIZ flow related knowledge system to help engineers solve similar problems.