高磁损耗FeNiCo/PET叠层膜的电镀法制备研究

Preparation and Study of FeNiCo/PET Stacked Films with High Magnetic Loss by Electroplating Method

目的磁性合金薄膜在高频微波段具有高损耗的优势,但其磁性能随着厚度的增大而快速衰减,本文探讨磁性金属膜磁性能随厚度变化的原因,并发展一种大厚度条件下保持高磁损耗的低成本方法。方法以PET为基材,采用电镀法制备高磁损耗FeNiCo薄膜,通过多层叠加,层压获得具有绝缘夹层结构的磁性金属叠层厚膜。结果当PET夹层厚度为5μm、FeNiCo磁性膜厚度为1.7μm、总层数为10层即总厚度为67μm时,在1 GHz处的磁导率虚部仍可达到40.69,tμ''值为2726。经微带线法测试,[FeNiCo/PET]10叠层复合膜在1 GHz处的S21为−9.0 dB,Ploss/Pin为0.83,显著高于60μm厚的传统磁性贴片商品性能(分别为−1.9 dB和0.58)。结论绝缘间隔层的引入可以有效抑制层间的涡流效应,使其在较厚的厚度下仍能保持相对较高的磁导率和磁损耗,从而实现高效的电磁噪声抑制性能。

The magnetic alloy film has the advantage of high loss in the GHz range of microwave,but its magnetic permeability decays rapidly with the increase of thickness.The work aims to discuss the reason of magnetic decaying with the thickness of magnetic alloy films,and develop a low-cost method to maintain high magnetic losses under the condition of large film thickness.With PET as the substrate,FeNiCo films with high magnetic loss were prepared by electroplating,and magnetic metal stacked films with insulating interlayer structure were obtained by stacking the as-prepared alloy films with insulated substrates.The experimental results showed that when the thickness of the PET interlayer was 5μm,the thickness of the FeNiCo magnetic film was 1.7μm,and the total thickness of the stacked 10 magnetic films was 67μm,the imaginary permeability at 1 GHz was as large as 40.69,and the value of tμ"reached 2726.Moreover,the measured S21 and Ploss/Pin of[FeNiCo/PET]10 by the micro-stripline method at 1 GHz were−9.0 dB and 0.83 dB,which were much better than the−1.9 dB and 0.58 of traditional magnetic composites with a thickness of 60μm.Therefore,the insulation interlayers can effectively suppress the eddy current effect between magnetic films,so that it can maintain relatively high magnetic loss at a very large thickness,and achieve high electromagnetic noise suppression performance than existing materials.