基于Zigzag柔性簧片的大行程XY精密运动平台

High-stroke XY precision positioning stage based on Zigzag flexure hinge

通过采用Zigzag柔性簧片作为导向机构,提出了一种具有大行程、高精度、高频响、低应力的并联式XY二自由度精密定位平台,满足精密运动的需求。提出了以Zigzag柔性簧片单元为核心导向梁的柔顺精密运动平台结构,并采用音圈电机进行驱动,实现3 mm×3 mm的运动范围和60 Hz以上的固有频率。对Zigzag柔性簧片和传统直梁柔性簧片进行有限元仿真分析对比,验证Zigzag柔性簧片运动性能的优越性。接着,对XY两自由度运动进行解耦设计,减小运动带来的寄生(耦合)误差。运用有限元分析对平台进行优化,针对高频运动引发的疲劳损伤问题,改进定位平台的构型,降低最大应力,延长平台工作寿命。分析结果表明:该平台满足运动和解耦性能的设计要求,其寄生误差为0.012%,能够实现大行程以及较高频率的运动,并且响应快速,动态特性良好。实验结果表明,定位平台的固有频率达到60 Hz,开环分辨率达1.3μm,可实现XY方向±1.5 mm行程的运动。

A parallel XY precision positioning platform utilizing a Zigzag flexure hinge as a guiding mecha⁃nism is presented,designed for large strokes,high precision,high frequency,and low stress to meet preci⁃sion motion requirements.The implementation features a flexure-based motion platform with the Zigzag flexure hinge as the core guiding beam,driven by a voice coil motor,achieving a motion range of 3 mm×3 mm and a natural frequency exceeding 60 Hz.Finite element simulations compared the Zigzag flexure hinge with traditional straight beam hinges,demonstrating the Zigzag′s superiority.Additionally,a decou⁃pling design was employed to minimize parasitic errors from coupled motion.Finite element analysis opti⁃mized the platform′s configuration to mitigate fatigue damage from high-frequency movement,resulting in reduced maximum stress.The findings indicate that the platform satisfies the required motion and decou⁃pling performance,with a parasitic error of 0.012%.It supports large travel,high-frequency motion,rapid response,and excellent dynamic characteristics.Experimental results confirm a natural frequency of 60 Hz,an open-loop resolution of 1.3μm,and successful movement of±1.5 mm in the XY direction.