全金属固态振动陀螺机电耦合特性研究

Study on electromechanical coupling characteristics of all-metal solid state vibrating gyroscope

对全金属固态振动陀螺(ASVG)的机电耦合特性展开了研究。提出一种利用多物理场有限元仿真模拟ASVG静电激励的检测方法,依据静电驱动与检测原理分析了不同的驱动方式对静电驱动力的影响,优化了电极结构参数,并得到了检测电容的静态误差。结果表明:ASVG的振幅与施加的交流电压与直流偏压呈正比关系,并在1倍谐振频率的驱动电压下,其振幅最大为4.5μm,并被激发至四波腹状态,优化后的电极角度为40°,静电电极与振子间距保持在5μm时,其最大振幅为2.3μm,基本满足设计要求。最后,通过实验得到ASVG的幅频特性与机电特性,验证了分析结果的正确性和可用性。

Electromechanical coupling characteristics of all-metal solid-state vibrating gyroscope(ASVG)is studied.A detection method for simulating electrostatic excitation of ASVG using multi-physics field finite element simulation is proposed,the influence of different driving mode on electrostatic driving force is analyzed according to the principle of electrostatic drive and detection principle,the electrode structural parameters are optimized,and the static error of the detection capacitor is obtained.The results show that the amplitude of the ASVG is proportional to the applied AC voltage and DC bias,and under the driving voltage of double resonant frequency,its amplitude is up to the maximum of 4.5μm,and it is excited to the four-wave belly state,the optimized electrode angle is 40°,and the distance between the electrostatic electrode and the vibrator is maintained at 5μm.The maximum amplitude is 2.3μm,which basically meets the design requirements.Finally,the amplitude-frequency characteristics and electromechanical characteristics of the ASVG are obtained through experiments,which verifies the correctness and usability of the analysis results.