摘要
介绍了一种治理工业生产过程中产生的高浓度硅烷废气的工艺。先通过补充氮气降低可燃气体体积分数,使其低于爆炸下限,再通过硅烷燃烧筒、除尘器、氨气吸收塔逐步处理各组分,尾气达标排放至烟囱。
A process for treating high concentration silane waste gas generated in industrial production processes was introduced.First,reduce the volume fraction of combustible gas to below the lower explosive limit by supplementing nitrogen.Then,gradually process components through a silane combustion cylinder,dust collector,and ammonia absorption tower.Finally,the tail gas meets the standard is discharged to the chimney.
出处
《上海化工》
CAS
2024年第4期25-28,共4页
Shanghai Chemical Industry
关键词
硅烷
废气
治理
Silane
Waste gas
Treatment
