离子色谱法测定光刻胶中的氰根离子

Determination of Cyanide Ion in Photoresist by Ion Chromatography

建立了离子色谱法测定光刻胶中氰根离子的分析方法。光刻胶样品加入超纯水超声提取后,过固相萃取小柱净化,然后上机。经过阴离子色谱柱分离,电化学检测器检测,保留时间定性,峰面积外标法定量。结果表明:此方法检出限为2.0 ng/g(以1.0 g取样量计算)。在低、中、高浓度的精密度分别为4.7%、2.3%、1.1%。实际样品加标回收率范围为93.7%~104%。该方法操作简单、快速、灵敏度和准确度高,可用于光刻胶中氰根离子的定性与定量测定分析。

A method for the determination of cyanide ion in photoresist by ion chromatography was established.After ultrasonic extraction with ultra-pure water,the photoresist samples were cleaned by solid phase extraction cartridge,and then determined by IC.The cyanide ion and matrix was separated by anion chromatography column and detected by electrochemical detector.Then qualitative analysis was done by retention time and quantitative analysis of the peak area by external standard curve.The results showed that the detection limit of the method was 2.0 ng/g(calculated with 1.0 g for sample).The precision of low,medium and high concentration was 4.7%,2.3%and 1.1%respectively.The sample s recoveries ranged from 93.7%to 104%.The method was simple,rapid,sensitive and accurate,can be used for determination of cyanide ion in photoresist.