一种铝基均热板的制造工艺研究

Research on Manufacturing Process of an Aluminum Vapor Chamber

文中针对高功率器件的高效散热和轻量化设计需求,开展铝基均热板制造技术研究,设计了一种铝基均热板的成型工艺。利用钎焊烧结法制备一体化铝毛细芯,通过中温钎焊技术完成壳体封装,对烧结粉末成分、比例、烧结温度等工艺参数进行了优化,并对制备的样件进行了测试。测试结果表明,该工艺方案可获得厚度大于0.3 mm、孔隙率大于40%的结合强度大、均匀性好的铝毛细芯,制备的铝基均热板的当量导热系数大于1200 W,为铝基均热板的规模化生产提供了一种解决思路。

Aiming at the high efficiency heat dissipation and lightweight design requirements of high power devices,the manufacturing technology of aluminum vapor chamber is studied and a forming process of aluminum vapor chamber is designed in this paper.The integrated aluminum-based capillary core is prepared by welding and sintering method and the shell is sealed by moderate temperature welding technology.The process parameters such as the composition and proportion of sintered powders and sintering temperature are optimized and the samples are tested.The test results show that the aluminum capillary core can be obtained with thickness greater than 0.3 mm,porosity greater than 40%and with high bonding strength and good uniformity.The equivalent thermal conductivity of the prepared aluminum vapor chamber is greater than 1200 W,which provides a solution to the large-scale production of aluminum vapor chamber.