摘要
文章全面综述了硅基互补金属氧化物半导体太赫兹探测器领域的最新研究进展。通过分析晶体管如何超越传统截止频率上限来实现太赫兹波段的检测,展示了CMOS太赫兹探测器的技术潜能及其在理论研究和实际应用中的广泛前景。鉴于太赫兹技术在安全检测、无线通信和医学成像等领域的重要应用,文章旨在揭示CMOS太赫兹探测器如何通过技术创新和设计优化满足这些领域对高性能探测需求的挑战。文章首先梳理了探测器的工作原理和经典模型,总结了目前太赫兹探测技术的关键建模方法,为理解和提高探测性能奠定了基础。随后,探讨了多种提升探测器性能的方法,包括采用新型不对称结构设计和工艺改进,展示了通过创新设计和技术优化提升性能的潜在途径。此外,还介绍了太赫兹探测器与读出电路的集成技术,实现了小型化太赫兹相机的设计。这一进展不仅缩小了设备的尺寸,还使得太赫兹相机实现了视频流成像的功能。最后,文章对太赫兹探测成像系统技术的未来发展进行了前瞻,特别强调了小型化设计与灵敏度提升的重要性,旨在促进更广泛的研究工作和技术创新。
This paper provides a comprehensive review of the latest research advancements in silicon-based complementary metal-oxide-semiconductor(CMOS)terahertz(THz)detectors.By analyzing how transistors can exceed the traditional upper limits of cut-off frequencies to enable detection in the THz band detection,it showcases the technical potential of CMOS THz detectors and their broad prospects in both theoretical research and practical applications.Given the importance of THz technology in security screening,wireless communication,and medical imaging,this study aims to reveal how CMOS THz detectors meet the challenges of high-performance detection demands in these areas through technological innovation and design optimization.Initially,the working principles and classical models of the detectors are discussed,with the article meticulously organizing the current key modeling approaches for THz detection technology,laying a foundation for understanding and enhancing detection performance.Subsequently,the paper explores various methods to enhance the performance of detectors,including the adoption of novel asymmetric structural designs and process improvements,showcasing the potential pathways for performance enhancement through innovative design and technical optimization.Additionally,the paper introduces the integration technology of THz detectors and readout circuits,which has realized the design of miniaturized THz cameras.This advancement not only reduces the device size but also enables THz cameras to achieve video stream imaging functionality.Finally,this article looks forward to the future development of THz detection and imaging system technology,particularly emphasizing the importance of miniaturization and sensitivity enhancement,aiming to foster broader research efforts and technological innovation.
作者
张新
徐辉
傅海鹏
马凯学
ZHANG Xin;XU Hui;FU Haipeng;MA Kaixue(School of Microelectronics,Tianjin University,Tianjin 300072,China;China Academy of Space Technology(Xi’an),Xi’an 710000,China)
出处
《空间电子技术》
2024年第4期1-8,共8页
Space Electronic Technology
基金
科技部研发项目(编号:2018YFB2202500)。
关键词
硅基
太赫兹
探测器
成像系统
si-based
terahertz
detector
imaging system