类金刚石薄膜的摩擦腐蚀性能研究进展

Review on the Tribocorrosion Performance of Diamond-Like Carbon Films

类金刚石(Diamond-Like Carbon,DLC)碳膜具有硬度高、摩擦系数低、磨损率低、耐腐蚀性强等特点,自80年代以来备受关注,现已得到了广泛应用。但其摩擦腐蚀性能受微观结构、组分和环境介质影响较大,限制了实际应用范围。讨论了氢含量、掺杂异质元素及多层结构对DLC薄膜在溶液介质中摩擦腐蚀性能的影响,总结了DLC薄膜在海水环境、醇类环境及酸性环境中的摩擦腐蚀行为,探讨了薄膜在海水环境中的摩擦腐蚀机理。展望了DLC薄膜摩擦腐蚀性能的发展趋势。

Diamond-Like Carbon(DLC)films,which possess high hardness,low friction coefficient,superior wear re-sistance,and good corrosion resistance,have attracted much attention since the 1980s and are now widely used.However,the tribocorrosion performance of DLC films is affected by the microstructure,components,and environmental media with large differences,which limits the practical application scope.The effects of hydrogen content,doped heterogeneous elements,and multilayer structure on the tribocorrosion performance of DLC films in solution media are discussed.The tribocorrosion be-haviors of DLC films in seawater,alcohol,and acid environments are summarized.The tribocorrosion mechanism of the films in seawater environments is discussed.The development trend of tribocorrosion performance of DLC thin films is prospected.