MEMS Huygens Clock Based on Synchronized Micromechanical Resonators

With the continuous miniaturization of electronic devices,microelectromechanical system(MEMS)oscillators that can be combined with integrated circuits have attracted increasing attention.This study reports a MEMS Huygens clock based on the synchronization principle,comprising two synchronized MEMS oscillators and a frequency compensation system.The MEMS Huygens clock improved shorttime stability,improving the Allan deviation by a factor of 3.73 from 19.3 to 5.17 ppb at 1 s.A frequency compensation system based on the MEMS oscillator’s temperature-frequency characteristics was developed to compensate for the frequency shift of the MEMS Huygens clock by controlling the resonator current.This effectively improved the long-term stability of the oscillator,with the Allan deviation improving by 1.6343105 times to 30.9 ppt at 6000 s.The power consumption for compensating both oscillators simultaneously is only 2.85 mW·℃^(-1).Our comprehensive solution scheme provides a novel and precise engineering solution for achieving high-precision MEMS oscillators and extends synchronization applications in MEMS.