摘要
针对任意复杂膜系结构压电复合薄膜声表面波(SAW)器件横向杂波抑制及精确快速仿真方法,从数学上严格分析推导了有限长结构分层级联理论和色散2D-COM模型,可精确快速地计算压电复合薄膜SAW器件传播方向及孔径方向结构对杂波模式的影响,并通过色散2D-COM模型对SAW器件杂波抑制进行综合分析。通过对41°Y-X LiNbO_(3)/SiO_(2)/Si_poly/Si(111)复合衬底SAW谐振器的优化设计与研制,结果表明,设计优化结果与实验结果吻合较好,验证了该方法的有效性和可行性。
To achieve spurious wave suppression and its simulation for piezoelectric surface acoustic wave(SAW) devices with arbitrary piezoelectric complex film structure,this study derived the equation of hierarchical cascade theory and a dispersion 2D-COM model of SAWs with a finite-length structure on the basis of rigorous mathematical analysis.The proposed approach can accurately and quickly calculate the influence of the propagation and aperture direction of the SAW device.The dispersion 2D-COM model facilitates the analysis of the suppression of spurious waves in SAW devices.Experimental results obtained from the design and implementation of the SAW filter with a 41°Y-X LiNbO_3/SiO_2/Si_poly/Si(111) structure were in good agreement with the simulation results,verifying the effectiveness and feasibility of the method.
作者
王吉芳
陈平静
曹稚颖
潘虹芝
董加和
肖强
吴浩东
陈正林
马晋毅
WANG Jifang;CHEN Pingjing;CAO Zhiying;PAN Hongzhi;DONG Jiahe;XIAO Qiang;WU Haodong;CHEN Zhenglin;MA Jinyi(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Science and Technology on Analog Integrated Circuit Laboratory,Chongqing 400060,China;Key Laboratory of Modern Acoustics,Ministry of Education,Department of Acoustic Science and Engineering,School of Physics,Nanjing University,Nanjing 210093,China)
出处
《压电与声光》
CAS
北大核心
2024年第4期447-452,457,共7页
Piezoelectrics & Acoustooptics
