一种高密度压电变形镜驱动电源的设计

Design of a High-Density Piezoelectric Deformable Mirror Driving Power Supply

压电变形镜是自适应光学系统的执行机构。针对压电变形镜高精度、高动态应用的问题,设计了一款新型的压电陶瓷驱动电源,同时采取线性校正网络确保了放大电路的稳定性,并对影响输出精确度及非线性失真的原因进行了分析。实验结果表明,当驱动容性负载为0.33μF时,该驱动电源的大信号带宽可达3 kHz,阶跃响应的上升时间优于80μs,下降时间优于130μs,输出线性度为99.6%。

Piezoelectric deformable mirror is used as an actuator for adaptive optics system.In this study,a novel piezoelectric ceramic driving power supply is designed for high-precision and highly dynamic application of piezoelectric deformable mirror.The design adopts the linear correction network to ensure the stability of the amplification circuit.Furthermore,the reasons that affect the output accuracy and nonlinear distortion are analyzed.The experimental results show that when driving a capacitive load of 0.33 μF,the drive power supply exhibits a large signal bandwidth of up to 3 kHz,rise time of the step response greater than 80 μs,fall time greater than 130 μs,and output linearity of 99.6%.