大行程解耦微定位平台的设计与研究

Design and Analysis of Large-Stroke Decoupling Micro-Positioning Platform

针对目前研制的微定位平台行程小及耦合误差大等问题,提出了一种由压电作动器(PEA)驱动的二自由度微定位平台,设计了由二级杠杆放大机构和Scott-Russell机构串联组成的三级位移放大器,以扩大工作行程。采用平行轴式直圆型柔性铰链与并联构型的双复合式平行移动副消除运动耦合误差。通过有限元仿真和实验对平台性能进行了分析与测试。结果表明,设计的微定位平台工作行程超过170μm×170μm,耦合误差小于1.2%,位移分辨率可达5 nm,信号跟踪误差最大为2.16%,验证了微定位平台的定位精度和模型的正确性。

To address the issues of limited stroke and significant coupling error in currently developed micro-positioning platforms,a two-degree-of-freedom micro-positioning platform,powered by piezoelectric actuators(PEA),is proposed.Additionally,a three-stage displacement amplifier is designed,which combines a two-stage lever amplification mechanism and Scott-Russell mechanism in series,to extend the operational stroke.The motion coupling error is eliminated by using a parallel-axis straight-circle flexible hinge and double-compound moving pair in parallel configuration.Finally,the performance of the platform is analyzed and tested via finite element simulation and experiment.The results show that the operating stroke of the designed micro-positioning platform is over 170 μm×170 μm,coupling error is within 1.2%,displacement resolution is 5 nm,and signal tracking error is 2.16%.This verifies the positioning accuracy and accuracy of the model.