氨水中和废硫酸蚀刻液制备硫酸铵的研究

Research on the preparation of ammonium sulfate by neutralizing waste sulphuric acid etching solution with ammonia water

针对半导体行业废硫酸中H_(2)SO_(4)含量高、杂质含量低的特点,采用氨水中和法处理硫酸废液,中和后的溶液通过蒸发、浓缩、离心分离等过程,可生成固体硫酸铵产品。基于AspenPlus软件平台,研究了中和反应pH控制值对反应产物生成量的影响,并对氨水中和过程、硫酸铵溶液蒸发过程的工艺控制参数以及物料和能量消耗进行了模拟分析。根据模拟分析结果,新建20kt/a废硫酸资源化利用生产线,装置顺利投产后,生产的固体硫酸铵产品质量满足《工业硫酸铵》以及《肥料级硫酸铵》中Ⅱ型指标要求。

In response to the high content of H_(2)SO_(4) and low impurity content in waste sulphuric acid in the semiconductor industry,the ammonia neutralization method is used to treat sulphuric acid waste liquid.The neutralized solution can generate solid ammonium sulfate products through processes such as evaporation,concentration and centrifugal separation.Based on the Aspen Plus software platform,the influence of pH control value on the production of reaction products in neutralization reaction is studied,and the process control parameters,material and energy consumption of ammonia neutralization process and ammonium sulfate solution evaporation process are simulated and analyzed.According to the simulation analysis results,a new production line with a processing capacity of 20 kt/a for the resource utilization of waste sulphuric acid has been built.After the device is successfully put into operation,the quality of the solid ammonium sulfate products produced meets the requirements of Industrial Ammonium Sulfate and TypeⅡindicators in Fertilizer Grade Ammonium Sulfate.